Silicon Wafer

Epi Wafer

Epitaxial wafers (EPI wafers) are essential for high-performance semiconductor devices requiring enhanced electrical properties and precise doping control. At Kanetora, we provide high-quality EPI wafers with uniform thickness, low defect density, and excellent surface finish, supporting advanced applications in power, RF, and logic devices.

EPI Wafer

Diameter
(mm)
Epi Dopant Orientation Structure Design Epi Resistivity
(ohm-cm)
Epi Thickness
(µm)
Substrate Notes
150 Boron (B) /
Phosphorus (P)
100 / 111 Single or
multiple layers
0.02 ~ 1000 1 ~ 150 Polished, SOI wafer,
or others
Turnkey solution or
buried layer Epi service
200 Boron (B) /
Phosphorus (P)
100 / 111 Single or
multiple layers
0.02 ~ 1000 1 ~ 150 Polished, SOI wafer,
or others
Turnkey solution or
buried layer Epi service
300 Boron (B) /
Phosphorus (P)
100 / 111 Single or
multiple layers
0.02 ~ 1000 1 ~ 150 Polished, SOI wafer,
or others
Turnkey solution or
buried layer Epi service

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