Silicon Wafer

Compound Semiconductor

Compound semiconductor wafers, such as GaN and SiC, enable high-efficiency, high-frequency, and high-voltage applications that silicon alone cannot achieve. Kanetora offers advanced compound wafers to support next-generation power electronics, communication, and sensing technologies.

1. GaN Wafer

Gallium Nitride (GaN) wafers are essential for high-power, high-frequency, and high-efficiency applications. At Kanetora, we provide high-quality GaN wafers with excellent crystalline properties, supporting next-generation technologies in RF communication, power electronics, and optoelectronics.

 

Growth Method HVPE
Fe Ge Undoped
Conduct Type Semi-Insulating N N
Type/Dopant Fe Ge Undoped
Size 10×10.5 mm / 100.5 ± mm
OF location/length <1-100> ± 0.5° / 32.0 ± 1.0 mm
IF location/length <11-20> ± 3° / 18.0 ± 1.0 mm
Orientation C-plane <0001> off angle toward M-Axis 0.35° ± 0.15°
Resistivity (300K) ≥1E6 ohm-cm <0.050 ohm-cm <0.5 ohm-cm
EPD (1 ~ 9)E5/cm² 5E5 ~ 3E6/cm² (1 ~ 3)E6/cm²
Ra (nm) Front surface Ra ≤ 0.2 nm
TTV (µm) ≤ 15
Bow (µm) ≤ 20
Warp (µm) ≤ 20
Epi-ready Yes

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Bare Silicon Wafer

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